Axio Imager Vario suitable for large-sized samples

NegotiableUpdate on 01/20

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Overview

Axio Imager Vario is suitable for detecting large-sized samples. It has an automatic focusing system and meets the requirements of ultra clean room level for analysis From small MEMS sensors to ultra large XXL wafers, or even whole flat microscopes, there will be no damage to the sample during the process. With the help of With a lateral movement distance of 300 mm and a vertical depth of 254 mm, you can detect a large number of samples under the Axio Imager Vario. The integrated column design ensures stability. The Axio Imager Vario has been certified according to DIN EN ISO 14644-1 standard and meets the requirements of cleanroom level 5 for wafer inspection in ultra clean rooms. Using an electric motor that drives the Z-axis and automatic focusing hardware to ensure automatic adjustment to a better focusing position.

Product Details

characteristic:

Two manual and one electric motor column (equipped with three mode control buttons that comply with industry standards) are available for selection, making full use of the microscope The advantage of a horizontal and vertical movement distance of 300 mm and a vertical depth of 254 mm.
The Axio Imager Vario can focus the sample by moving the objective lens up and down. This means that even heavier samples can achieve high precision focusing accuracy and repeatability.
With the help of autofocus hardware, you can accurately and quickly focus low contrast reflective samples.
Axio Imager Vario combined with LSM 700 for high-resolution non-contact analysis of sensitive samples.
Axio Imager Vario has been certified according to DIN EN ISO 14644-1 standard and meets the requirements of cleanroom level 5.

Ultra clean room:

Semiconductor manufacturing and wafer inspection need to be completed in an ultra clean room. According to DIN EN ISO 14644-1 standard, it is classified into different grades based on the number and size of particles per cubic meter. In cleanroom applications, Axio Imager Vario has been certified to this standard and meets the requirements of cleanroom level 5. The ISO 5 level for cleanrooms is equivalent to the 100 level of the original FED STD 209E (1992) standard. The cleanroom kit includes a 7-hole objective lens turntable, a particle protection cover, and an anti sneeze protection cover.

Auto focus hardware:

The Axio Imager Vario, integrated with the Auto Focus hardware system, is capable of achieving fast and precise focusing within a focus capture range of up to 12000 µ m. In industrial production and research applications, you need a high-precision focusing system with a focusing accuracy of 0.3 times the depth of field of the objective lens. This automatic aggregation hardware is suitable for applications that use reflected light, transmitted light, bright field, dark field, polarization, differential interference phase difference, and oblique illumination observation methods.