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High temperature four probe resistivity testing system details introduction

NegotiableUpdate on 05/26
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Overview

High temperature four probe resistivity testing system details introduction

Product Details

Function Overview: Overview

1. Four probe dual electric combination measurement method for testing square resistance and resistivity system combined with high-temperature chamber

2. Configure a high-temperature four probe test probe fixture

3. PC software for data processing and measurement control

4. Range testing range

High temperature four probe resistivity testing system details introduction

Application Description:

The conductivity of semiconductor materials requires temperature measurement, and the measurement and control software can real-time draw the change curve graph of temperature and resistance, resistivity, conductivity data, as well as the report analysis of process data values

Applicable industry: Applicable

industry:

Used for measuring the resistivity of conductive ceramics, silicon, germanium single crystals (rods, chips), determining the block resistance of silicon epitaxial layers, diffusion layers, and ion implantation layers, as well as measuring the block resistance, resistivity, and conductivity data of new materials such as conductive glass (ITO) and other conductive thin films in enterprises, universities, and research departments

The dual electric four probe instrument uses linear four probe dual position measurement. Design in accordance with the physical testing methods for monocrystalline silicon


Standard and refer to the American A.S.T.M standard.

Models and Parametersand technical parameters:

Specification and model

Models

FT-351A

FT-351B

FT-351C

1. Sheet of block resistance range

resistance

10-5~2×105Ω/□

10-6~2×105Ω/□

10-4~1×107Ω/□

2. Range of resistivity

range

10-6~2×106Ω-cm

10-7~2×106Ω-cm

10-5~2×108Ω-cm

3. Test current range

range

0.1μA.μA.0μA,100µA,1mA,10mA,100 mA

1A、100mA、10mA、1mA、100uA、10uA、1uA、0.1uA

10mA ---200pA

4. Current accuracy

± 0.1% reading

± 0.1 reading

±2%

5. Resistance accuracy

≤0.3%

≤0.3%

≤10%

PC software interface

PC software interface

Display: resistance, resistivity, square resistance, temperature, unit conversion, temperature coefficient, current, voltage, probe shape, probe spacing, thickness

Conductivity

LCD: resistance.resistivity.

sheet resistance. temperature.unit

conversion. temperature coefficient. current. voltage. probe shape. probe

spacing. thickness

7. Test mode

Double electrical measurement

measurement

8. Working power supply for four probe instrumentpower

AC 220V±10%.50Hz <30W

9. Errors

≤ 3% (standard sample result standard)

samples)

≤15%

High temperature (optional)

(choose and buy)

Normal at room temperature

temperature -400℃; 600℃; 800℃; 1000℃; 1200℃; 1400℃; 1600℃

Atmosphere protection (gas to be provided by customers)

Atmosphere protection(Gas

was provided by customers themselves)

The commonly used gases are helium (He), neon (Ne), argon (Ar), krypton (Kr), xenon (Xe), radon (Rn), all of which are colorless, odorless, and gaseous

monatomic molecule

The usual gases are:

helium (He). neon (Ne). argon (Ar). krypton (Kr). xenon (Xe). and radon (Rn).

all in colorless. odorless. gaseous monatomic molecules.

Temperature Accuracy

Temperature precision

Blunt temperature value

temperature values:≤1-3℃; Control precision: ± 1 ° C

Heating rate:

rate of temperature

increase

Starting from room temperature, it takes 15 minutes to reach 400 ℃ to 800 ℃; 800 ℃ -1200 ℃ takes 30 minutes; 1400 ℃ -1600 ℃ takes 250-300 minutes

About 15 minutes at room

temperature to 400 ℃. 800 ℃; 800 ℃ to

1200 ℃ need 30 minutes; 1400 ℃ to 1600 ℃ to 250 minutes. 300 minutes

high temperature materials