Leica EM RES102 multifunctional ion thinning instrument

Leica EM RES102 multifunctional ion thinning instrument

Sample preparation suitable for TEM, SEM, and LM

Leica EM RES102 is a unique ion beam grinding device with two saddle field ion sources and adjustable ion beam energy to achieve optimal ion grinding results.

This independent desktop device integrates TEM, SEM, and LM sample preparation functions, which is completely different from other devices on the market. In addition to high-energy ion milling

In addition to its functions, the Leica EM RES102 can also be used for low-energy and extremely mild ion beam grinding processes.

Single or double-sided ion beam grinding is suitable for the ion beam thinning process of materials. A saddle shaped ion source can obtain a large transparent thin region of electron beam.

Programmed control of ion incidence angle changes is suitable for special sample preparation purposes, such as cleaning FIB samples to reduce amorphous layers.

The maximum polishing area of ion beam polishing can reach 25mm.

Ion beam cleaning is suitable for cleaning the contaminated layer on the surface of the sample or the smearing layer generated on the surface after mechanical polishing.

The surface contrast enhancement effect of the sample can replace chemical etching.

35 ° slope cutting is used to prepare cross-sections of multi-layer samples.

90 ° slope cutting is used for preparing semiconductor samples or assembling devices with composite structures, which requires minimal mechanical pre-processing work.

-It depends on your choice

To support diverse application needs, Leica EM RES102 can be equipped with various sample stages for TEM, SEM, and LM sample preparation. Pre extraction room

The system enables rapid exchange of samples, thereby effectively improving the efficiency of sample exchange.

This sample stage is suitable for ion beam cleaning, polishing, and contrast enhancement of SEM and LM samples, and can be used at ambient temperature or with LN2 cooling. SEM sample stage

Samples with a maximum size of 25mm can be prepared. The adapter is used to clamp SEM sample holders with 3.1mm diameter pins for commercial production.

The slope cutting sample stage is suitable for cutting samples to obtain longitudinal sections (90 °) or oblique sections (35 °), which facilitates SEM observation of the internal longitudinal structure of the sample. It can be used at ambient temperature or under LN2 cooling conditions. SEM clamp holder to hold small sampleswith maximal dimensions of 5(H) x 7(W) x2(T)mm.This holder can be easily transferredto the SEM without removing the sample.TEM Sample Holder (Quick ClampHolder)for single and double-sided low angle millingdown to 4 °.

The thin sample table is used to hold samples with a maximum size of 5 (H) × 7 (W) × 2 (D) mm. This sample stage can be easily transferred directly into SEM without the need to remove the sample

Product.

TEM sample holder is used for single-sided or double-sided ion beam thinning, with a thinning angle as low as 4 °.

TEM frozen sample fixture is used in conjunction with LN2 refrigeration device for preparing temperature sensitive samples.

The FIB cleaning sample stage is used to clean FIB samples and reduce the surface amorphous layer.

Leica EM RES102 can perform ion beam thinning, cleaning, cross-sectional cutting, polishing, and contrast enhancement on samples, greatly meeting your diverse and convenient application needs.

› 19 "touch screen computer control unit, monitoring and recording the sample preparation process

› Built in application parameter library

› Programmed sample preparation parameter setting accelerates beginner learning curve

› Help files to assist beginners and maintain devices

Efficient/Cost saving

Integration of TEM, SEM, and LM application functions

The thin area obtained from TEM sample preparation is large, effectively improving the efficiency of TEM sample preparation

SEM sample preparation can achieve a maximum sample diameter of 25mm

The pre pumping chamber system helps to quickly exchange samples, reduce waiting time, and ensure continuous high vacuum in the sample chamber

› LAN function facilitates remote control

The LN2 sample stage enables temperature sensitive samples to undergo ion milling under optimized conditions

safety

Accurate automatic termination function, suitable for optical termination or Faraday cup termination of transparent samples

During the sample preparation process, live images or videos can be stored in real-time

› Driven by ion source and sample motion motor, programmed control allows for reproducible sample preparation results