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Phone
+86-1381-880-1372(24H)
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Address
Room 702, 7th Floor, Building 36, No. 1888 Xinjinqiao Road, Pudong New Area, Shanghai 201206
Bodong Enterprise (Shanghai) Co., Ltd
+86-1381-880-1372(24H)
Room 702, 7th Floor, Building 36, No. 1888 Xinjinqiao Road, Pudong New Area, Shanghai 201206
Residual gas analysis mass spectrometer PrismaPlus--Quadrupole mass spectrometer
Shanghai Bodong acts as an agent for the German Pfeiffer residual gas mass spectrometry QMG series, with modular design and mass number ranges of 1-100 amu, 1-200 amu, and 1-300 amu. Built in quadrupole analyzer, quadrupole electronics, power supply components, and Quadera software. The QMG series ion source for residual gas mass spectrometry is equipped with two sets of filaments, suitable for various measurement purposes and has a long service life.
Pfeiffer Quadrupole Mass Spectrometer PrismaPlusMain advantages:
Modular design provides the best adaptability for products
2. Compact structure and outstanding performance
3. Multiple interfaces, simple system integration
4. Can be networked through Ethernet
5. The testing process is fast and stable, with high resolution
6. Analyzer and electronic replaceability
7. Dual filament design ensures maximum reliability
8. The lowest detectable partial pressure reaches 1 x 10E-14 mbar
9. Configure Quadera ® Software, intuitive operation
PrismaPlus residual gas analyzerTechnical parameters:
|
model |
QMG 220 F1 |
QMG 220 F2 |
QMG 220 F3 |
QMG 220 M1 |
QMG 220 M2 |
QMG 220 M3 |
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detector |
Faraday (F) |
Electron multiplier/Faraday C-SEM/Faraday (M) |
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Mass count amu |
1–100 |
1–200 |
1–300 |
1–100 |
1–200 |
1–300 |
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Quadrupole pole diameter/length |
6/100 mm |
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Minimum detection limit F mbar |
1X10-12 |
2X10-12 |
4X10-12 |
5X10-12 |
1X10-11 |
2X10-11 |
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Minimum detection limit M mbar |
- |
- |
- |
1X10-14 |
< 2X10-14 |
< 4X10-14 |
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Sensitivity to Ar F A/mbar |
1X10-3 |
6X10-4 |
3X10-4 |
5X10-4 |
3X10-4 |
1.5X10-4 |
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Sensitivity to Ar M A/mbar |
- |
- |
- |
200 |
200 |
100 |
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Maximum working pressure F |
1X10-4 mbar |
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Maximum working pressure M mbar |
- |
- |
- |
1X10-5 |
1X10-5 |
1X10-5 |
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The impact on adjacent mass numbers |
< 10 ppm |
< 20 ppm |
< 50 ppm |
< 10 ppm |
< 20 ppm |
< 50 ppm |
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Operating temperature F |
150 °C |
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Baking temperature F |
200 °C / 300 °C |
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Connecting flange |
DN 40 CF-F |
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weight |
2.4 kg |
2.4 kg |
2.4 kg |
3.8 kg |
3.8 kg |
3.8 kg |
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Application of residual gas analysis mass spectrometer:The quadrupole mass spectrometer QMG is highly suitable for leak detection, residual gas analysis, and comprehensive quantitative analysis
1. Metallurgy 2 Vacuum furnace 3 Accelerator 4 Sputtering process analysis 5 Semiconductor production 6 Glass coating 7 R&D 8 Vacuum process
Shanghai Bodong Residual Gas Analysis Mass Spectrometer Customer Case 1: Molecular Beam Epitaxial MBE Gas Analysis

Customer Case 2 of Shanghai Bodong Residual Gas Analysis Mass Spectrometer: Qualitative and Semi Quantitative Analysis of Residual Gas in XPS System Analysis Room

Shanghai BodongResidual gas analysis mass spectrometerCustomer Case Three: Analysis of Gas Composition and Content Generated during Vacuum Brazing Process

1. Compact design
PrismaPlusTMIt is a new type of mass spectrometer for quantitative and qualitative gas analysis and leak detection. The PrismaPlusTM quadrupole mass spectrometer has accumulated rich application experience, and the perfect combination of high sensitivity, high stability, and intelligent operation is a new advantage of the PrismaPlusTM quadrupole mass spectrometer. In application, customers will feel its sturdy, compact design and simple system integration, and benefit from it.
2.Wide range of applications
By selecting a range of mass numbers, detectors, ion sources, and interface interfaces, this quadrupole mass spectrometer can be applied in multiple fields, such as industrial and analytical fields, research and development, leak detection, semiconductor production, and coating processes. PrismaPlusTM quadrupole mass spectrometer is the best solution for applications ranging from quality assurance, residual gas analysis to comprehensive quantitative analysis.
3.Fast detection speed and high sensitivity
The PrismaPlusTM quadrupole mass spectrometer can provide accurate detection results in three different mass number ranges (1-100, 1-200, 1-300 amu), down to the detection limit of 1 * 10-14 mbar. In a vacuum system, with the use of effective Farad, di, and electron multiplier detectors, even low levels of contamination can be quickly identified. In addition to displaying selectable partial pressures, simply adding a pressure gauge can make the PrismaPlusTM quadrupole mass spectrometer an accurate full pressure monitor.
4.Intelligent software
Quadera software is not only easy to operate, but also provides an easy to read platform for capturing and observing all test data and parameter records. By combining multiple interface options such as Ethernet, digital, and analog input/output, it can be easily integrated into various systems. Simply tap the mouse to activate the preset functions.
PrismaPlusTM Quadrupole mass spectrometerSize and accessories:


PfeifferGas mass spectrometerShanghai Bodong Vacuum Products Division is the designated sales and maintenance center of Pfeiffer in Germany. Our company is the earliest agent of Pfeiffer products in China, importing 100% original equipment and providing after-sales maintenance services for Pfeiffer's full range of vacuum products.