With a 60 year history of technological innovation and industry leadership, FEI has become a leader in transmission electron microscopy (TEM), scanning electron microscopy (SEM), and DualBeam that integrates SEM with focused ion beam (FIB) ™ Performance standards for instruments and specialized focused ion beam instruments used for precision high-speed cutting and processing. The FEI imaging system has achieved sub angstrom (angstrom: one tenth of a nanometer) resolution in the fields of 3D characterization, analysis, and modification/prototyping.

Prisma &Prisma EXMulti functional environmental vacuum tungsten filament analysis scanning electron microscope
- A truly versatile SEM tungsten filament scanning electron microscope with comprehensive performance and easy operation for laboratory use
- Featuring a unique ESEM ™ Environmental vacuum mode
- High vacuum, low vacuum, and ESEM ™ There are three vacuum modes for analyzing the widest range of samples, including conductive materials, non-conductive materials, degassed, uncoated, or other samples that are not suitable for vacuum.
- A series of integrated real-time analysis software are used to complete dynamic experimental detection and analysis.
- Low vacuum and ESEM environmental vacuum can meet the detection and analysis of non-conductive materials and tax containing samples
- The in-situ function enables reliable analysis results to be obtained even for insulated or high-temperature samples.
- Supporting pre scanning settings, cameras with navigation and SmartScanTM functions improve work efficiency, data quality, and meet higher usage requirements.
- -In situ analysis within the temperature range of 165 ° C to 1400 ° C
- Acceleration voltage: 200 V -30 kV
- Electronic magnification: 6x -1000000x (can simultaneously capture and display four images)
- Detector: Everhart Thomley Secondary Electron Detector (E-T SED) in high vacuum mode; Low vacuum SE detector (LVD); ESEM Environmental Vacuum Mode Gas Secondary Electron Detector (GESD); Sample Room Infrared CCD Camera
- Vacuum system: 1 250L/s turbo molecular pump, 1 rotary mechanical pump; The patented "through lens" differential pressure vacuum system; Exhaust time ≤ 3.5min to high vacuum, ≤ 4.5min to ESEM vacuum/low vacuum; Optional CryoCleaner cold trap; Optional upgrade to oil-free rolling/dry PVPs
- Sample Room:
Inner diameter 340 mm
Analyze the working distance of 10mm
12 attachment interfaces
EDS acquisition angle: 35 °
高真空模式
- 3.0 nm @ 30 kV (SE)
- 4.0 nm @ 30 kV (BSE)*
- 8.0 nm @ 3 kV (SE)
Deceleration mode under high vacuum
Low vacuum mode
- 3.0 nm @ 30 kV (SE)
- 4.0 nm @ 30 kV (BSE)
- 10 nm @ 3 kV (SE)
- ESEM environmental vacuum