Desktop Active Vibration Isolation Optical Platform - Desktop Active Vibration Isolation Platform - Herz TS Series

sketch:

In the 21st century, nanotechnology (such as advanced semiconductors representing information related technologies, scientific related technologies such as gene therapy, atomic or molecular processing, engineering technologies such as MEMS and new material generation), vibration, noise, electromagnetic fields, heat, humidity, interference, and so on will be limiting factors for measuring the environment. In nanotechnology, in order to achieve reliable results, it is difficult to use an air flotation platform to isolate the low-frequency range, and active isolation is required.

The desktop active vibration isolation table Herz TS Series advanced active vibration isolation system will serve as the foundation of vibration isolation technology for nanotechnology in the 21st century, and will help promote current technology and measurement, innovation, and development of unknown technologies. The TS series provides excellent active isolation performance in all six degrees of freedom over a wide range of 0.7 Hz to 100 Hz.

Working Principle:

Desktop Active Vibration Isolation Optical Platform - The Herz TS Series adopts advanced vibration isolation technology, which can isolate vibrations in 6 spatial directions (including horizontal and vertical directions). The TS series active vibration isolation platform uses a piezoelectric acceleration sensor in the controller to convert the pressure signal of external vibration into an electrical signal and send it to the piezoelectric transducer in the isolation module. Then, the piezoelectric transducer will generate a pressure signal equal in magnitude to the incoming pressure but opposite in direction to eliminate the incoming vibration. The isolation system utilizes a feedback loop to eliminate mechanical resonance in the isolation system.

Performance comparison（TS-150/LP）：

Comparison of vibration acceleration

The data on the right shows the vibration isolation performance of TS-150/LP, horizontally (X, Y) and vertically (Z).

Blue line: Ground vibration acceleration

Red line: TS-150/LP surface mounting plate acceleration

- Vibration transmission rate

The data on the right shows the vibration transmission rate from the ground to the TS-150/LP surface mounting plate, horizontally (X, Y) and vertically (Z).

Vertical axis: Transmittance, unit: dB

(20 dB = x 10、0 dB = x 1、-20 dB = x 0.1、 -40 dB = x 0.01、-60 dB = x 0.001)

This data indicates that the active isolation system has excellent isolation performance in the low-frequency range of 1 Hz to 100 Hz.

Desktop Active Vibration Isolation Optical Platform - Desktop Active Vibration Isolation Platform - Herz TS Series Technical Parameters:

Combining soundproof speakers to create the best measurement environment：

For atomic or molecular research, such as scanning electron microscopy, the TS series active isolation system is crucial. In addition, not only vibration but also acoustic suppression should be considered. The AEk soundproof box we produce is suitable for ultra-high resolution applications such as SPM. Integrating AEk and TS series can provide the best measurement environment.

Paired with AEK-2002 soundproof speaker: The AEK system uses multiple layers of variable density soundproof materials, which can effectively isolate broadband noise.

TS application example：