Q300T T Plus Three Target Large Chamber Fully Automatic Sputtering Coating Instrument

Q300T T PlusThree target large chamber fully automatic sputtering coating instrument

Q300T T Plusused for200 mmDiameter（8A large sample or multiple small samples below inches are a large chamber turbo pump sputtering coating system suitable for thin film research and ordinary scanning electron microscopy/Preparation and application of field emission scanning electron microscopy samples. It is equipped with three independent sputtering heads to ensure uniform deposition of a single large sample or multiple small samples. For economical coating of small samples, the "single target" mode can be selected.Q300T T PlusDesigned to sputter a series of oxidized and non oxidized (precious metal) metal targets, with three standard pieces57 mmdiameterx 0.3 mmChromium of the same thickness（Cr）Target. Please note: cannot be usedQ300T T PlusConfigure each sputtering head with three different sputtering metals to achieve three-layer continuous coating!

For continuous coating of two layers of different materials, please refer toQ300T D PlusFor other large chamber coating instruments, please refer toK975X/K975Sas well asQ300T ES Plus.

Instrument features:

•mbar5 x 10^-5mbarOr better

•Capacitive touch screen, high sensitivity, easier to touch and use; The user interface software has been fully updated, using modern smartphone technology interface

•Comprehensive text help page

• USBThe interface allows for easy software updates and backup of recipe files/copy toUSBmemory

• logThe file format is.csv, containing date, time, and working parameters, can be exported toExcelOr analyze in similar software

•Allow multiple users to input and store coating solutions, and arrange each user's formula based on recent usage

• 16GBMemory, dual coreARMProcessor, capable of achieving fast response display; Full graphic interface with touch screen buttons, including recently used ones1000Features such as a coating log

Removable glass chamber with implosion protection cover, optional high chamber

•Multiple sample tables to choose from

•Three large-area sputtering heads with the same target material; Magnetron cold sputtering; Pulse cleaning for sputteringAlaluminium

•Optional film thickness monitoring accessory（FTM）

•Large and multicoloredLEDIndicator light, realizing visual status indication; After the program is completed, there will be an audio sound prompt

Recommended application:

Ideal large-area sputtering coating application

•Wafer inspection

•Choose the "single target" mode to achieve economical coating applications

•Can sputter various easily oxidizable and non easily oxidizable metals for the preparation of thin films and multiple samples for scanning electron microscopy

Q300T T PlusIt's EnglandQuorumInternationally recognized productsQA part of the series of coating machines, used by thousands of customers worldwide.QThe series aims to provideSEM、TEMProvide high-quality coating solutions for thin film applications,QThe series has diverse functions, reasonable prices, and is easy to use. These products are exclusively for scientific research purposes.

Q PlusThere are also versions of the series coating machine with smaller chambers, please refer to:Q150R Plus、Q150T Plusas well asQ150V Plus；SC7620andQ150GBIt is also an optional model.