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Beijing Century Kexin Scientific Instrument Co., Ltd

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    Room 102, Building D, Jingmao International Apartment, Jingtong Expressway Exit, Chaoyang District, Beijing

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Dual probe surface 3D morphology analysis system

NegotiableUpdate on 01/17
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Overview
Dual probe surface 3D morphology analysis system
Product Details

Product Introduction:

By using color laser confocal technology, it is possible to detect the micro - and sub micron level roughness of material surfaces, and perform 2D contour/3D micro morphology scanning analysis. It has the advantages of high measurement accuracy, fast speed, and good repeatability.

This system can be used to measure large-sized samples, and the software features include powerful functions such as point measurement, line measurement, and surface measurement. Optional modules include 2D&3D roughness detection and analysis, 2D contour measurement and 3D morphology analysis, flatness detection, coplanarity detection, parallelism detection, etc.

Characteristics of this system:

1、 Adopting transmission device: driven by linear magnetic axis motor

2、 Professional Integrated Design

3、 Rich 3D measurement

4、 Diverse three-dimensional observations

technical parameter

Technical parameters:

 

Probe A

Probe B

Working distance

11mm

19mm

range

±190um

±1700um

Maximum inclination angle

±28°

±21°

Spot size

10um

20um

resolving power

10nm

40nm

accuracy

±0.02%F.S.

±0.02%F.S.

Minimum thickness measurement

12um

66um

Maximum thickness measurement

511um

5098um

Electric table parameters:

XY platform

drive

Linear magnetic axis motor

Platform size

220X230mm

XY direction travel

100X100mm

resolving power

0.05μm

Repetitive positioning accuracy

<1μm

Maximum allowable load

2Kg

scanning speed

≤80mm/s

Scanning spacing

≥0.5μm

Electrical characteristics

Rated input of controller (dedicated computer)

100-240V AC 5.3A 50/60Hz

Rated input of drive (dedicated chassis)

48V DC 2.1A

Sensor input

24V DC 3A