- Phone
-
Address
Room 102, Building D, Jingmao International Apartment, Jingtong Expressway Exit, Chaoyang District, Beijing
Beijing Century Kexin Scientific Instrument Co., Ltd
Room 102, Building D, Jingmao International Apartment, Jingtong Expressway Exit, Chaoyang District, Beijing
Product Introduction:
By using color laser confocal technology, it is possible to detect the micro - and sub micron level roughness of material surfaces, and perform 2D contour/3D micro morphology scanning analysis. It has the advantages of high measurement accuracy, fast speed, and good repeatability.
This system can be used to measure large-sized samples, and the software features include powerful functions such as point measurement, line measurement, and surface measurement. Optional modules include 2D&3D roughness detection and analysis, 2D contour measurement and 3D morphology analysis, flatness detection, coplanarity detection, parallelism detection, etc.
Characteristics of this system:
1、 Adopting transmission device: driven by linear magnetic axis motor
2、 Professional Integrated Design
3、 Rich 3D measurement
4、 Diverse three-dimensional observations
Technical parameters:
|
|
Probe A |
Probe B |
|
Working distance |
11mm |
19mm |
|
range |
±190um |
±1700um |
|
Maximum inclination angle |
±28° |
±21° |
|
Spot size |
10um |
20um |
|
resolving power |
10nm |
40nm |
|
accuracy |
±0.02%F.S. |
±0.02%F.S. |
|
Minimum thickness measurement |
12um |
66um |
|
Maximum thickness measurement |
511um |
5098um |
Electric table parameters:
|
XY platform |
drive |
Linear magnetic axis motor |
|
Platform size |
220X230mm |
|
|
XY direction travel |
100X100mm |
|
|
resolving power |
0.05μm |
|
|
Repetitive positioning accuracy |
<1μm |
|
|
Maximum allowable load |
2Kg |
|
|
scanning speed |
≤80mm/s |
|
|
Scanning spacing |
≥0.5μm |
|
|
Electrical characteristics |
Rated input of controller (dedicated computer) |
100-240V AC 5.3A 50/60Hz |
|
Rated input of drive (dedicated chassis) |
48V DC 2.1A |
|
|
Sensor input |
24V DC 3A |