Flat plate scanning atomic force microscope FM Nanoview LSCL-AFM

NegotiableUpdate on 01/17

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

Flat plate scanning atomic force microscope FM Nanoview LSCL-AFM

Product Details

◆Commercialized atomic force microscope for combined mobile scanning of probes and samples;

◆Adopting a three-axis independent closed-loop piezoelectric translation scanning stage to achieve large-scale high-precision scanning;

◆Three axis independent scanning,XYZNot affecting each other, very suitable for 3D material and morphology detection;

◆Electric control sample moving table and lifting table, programmable multi-point position for fast and automated detection;

◆Longmen style scanning head design, marble base, vacuum adsorption and magnetic adsorption stage;
◆Intelligent needle insertion method for automatic detection of pressurized ceramic by motor control, protecting probes and samples;
◆High magnification assisted optical microscopy positioning, real-time observation and positioning of probes and sample scanning areas;

◆The closed-loop piezoelectric scanning table does not require nonlinear correction, and its nano characterization and measurement accuracy are superior to99.5%.

technical parameter

Working mode	Contact mode, tap mode	Sample weight	≤0.5Kg
Optional mode	Friction/lateral force, amplitude/phase, magnetic/electrostatic force	Z lifting platform	Stepper motor drive control, minimum step size 10nm
Force spectrum curve	F-Z force curve, RMS-Z curve	Z lifting stroke	15mm (optional 20mm, 25mm)
XY scanning method	Sample driven scanning, closed-loop piezoelectric translation scanning stage	Optical positioning	5X optical objective lens (optional 10X/20X objective lens)
Z-scan method	Probe driven scanning	camera	5-megapixel digital CCD
XY scanning range	Closed loop 100 × 100um	Scanning rate	0.6Hz~30Hz
Z-scan range	5um	Scanning angle	0~360°
Scanning resolution	Closed loop XY direction 0.5nm, Z direction 0.05nm	Operating environment	Windows XP/7/8/10 operating system
XY sample stage	Stepper motor drive control, with a movement accuracy of 1um	communication interface	USB2.0/3.0
XY movement stroke	100 × 100mm (optional 200 × 200mm, 300 × 300mm)	Instrument structure	Longmen style scanning head, marble base
Sample stage	Diameter 100mm (optional 200mm, 300mm)	Shock absorption method	Spring suspension type (optional active shock absorber platform)

Application Cases

sAPPHIrE wAFEr/Scanning range1µm×1µm/Sa=1.7nm, Sq=2.08nm

砷化镓晶圆.png 表格2.png 平板扫描2.png

Gallium arsenide wafer/Scanning range0.9µm×0.9µm/Sa=2.15nm, Sq=2.69nm